Au　film　was　fabricated　on　Al2O3　substrate　by　magnetron　sputtering.　The　relationship　between　resistivity　of　metallic　film　and　its　surface　roughness,　residual　stress　was　investigated　according　to　experimental　results.　The　results　show　that　the　resistivity　of　the　metallic　film　correlates　with　surface　roughness　and　residual　stress.　The　increase　of　resistivity　with　surface　roughness　and　tensile　residual　stress　can　be　explained　by　the　strain　energy　theory.　It　can　be　inferred　that　crystal　orientation　may　be　connect　with　the　mechanical　behavior　and　functional　property　of　metallic　film.