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Author:

Li Yuanyuan (Li Yuanyuan.) | Zhang Ziyi (Zhang Ziyi.) | Guan Jiahao (Guan Jiahao.) | Li Li (Li Li.) | Li Shuli (Li Shuli.) | Cheng Zhen (Cheng Zhen.) | Yang Rui (Yang Rui.) | Zhang Yunzhe (Zhang Yunzhe.) | Zhao Xiaoxia (Zhao Xiaoxia.) | Xu Kewei (Xu Kewei.)

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Abstract:

A series of SnO2 thin films doped with low-dose Al (<= 1mol%) were prepared on slide glass substrates by radio frequency (RF) magnetron sputtering. The crystal structure and optical properties were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), UV-IR spectrometer, and photoluminescence (PL) measurements. Results show that the lattice constant c decreases with increasing the Al content, which implies that Al atoms are successfully introduced into the SnO2 and occupy the Sn sites, and large number of oxygen vacancies are generated. The average transmittance values are higher than 88% within the visible spectral region (400-800 nm) for all the films. The bandgap broadens when the Al percentage increases, which is dominated by the Burstein-Moss (BM) effect. The PL spectra of these films have near band edge and deep level emission under the radiation excitation of 265 nm wavelength. The observed intensify of these peaks increases consistently with increasing the Al percentage.

Keyword:

crystal structure optical properties radio frequency (RF) magnetron sputtering SnO2 thin films

Author Community:

  • [ 1 ] [Li Yuanyuan]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 2 ] [Zhang Ziyi]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 3 ] [Guan Jiahao]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 4 ] [Li Li]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 5 ] [Li Shuli]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 6 ] [Cheng Zhen]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 7 ] [Yang Rui]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 8 ] [Zhang Yunzhe]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 9 ] [Zhao Xiaoxia]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 10 ] [Xu Kewei]Xian Univ, Shaanxi Key Lab Surface Engn & Remfg, Xian 710065, Shaanxi, Peoples R China
  • [ 11 ] [Xu Kewei]Xi An Jiao Tong Univ, Nanofilm & Biol Mat Res Ctr, Xian 710049, Peoples R China

Reprint Author's Address:

  • [Li, Yuanyuan]Shaanxi Key Laboratory of Surface Engineering and Remanufacturing, Xi'an University, Xi'an; 710065, China;;

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Source :

RARE METAL MATERIALS AND ENGINEERING

ISSN: 1002-185X

Year: 2021

Issue: 5

Volume: 50

Page: 1513-1517

0 . 5 0 6

JCR@2020

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:36

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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