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Abstract:
A series of SnO2 thin films doped with low-dose Al (<= 1mol%) were prepared on slide glass substrates by radio frequency (RF) magnetron sputtering. The crystal structure and optical properties were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), UV-IR spectrometer, and photoluminescence (PL) measurements. Results show that the lattice constant c decreases with increasing the Al content, which implies that Al atoms are successfully introduced into the SnO2 and occupy the Sn sites, and large number of oxygen vacancies are generated. The average transmittance values are higher than 88% within the visible spectral region (400-800 nm) for all the films. The bandgap broadens when the Al percentage increases, which is dominated by the Burstein-Moss (BM) effect. The PL spectra of these films have near band edge and deep level emission under the radiation excitation of 265 nm wavelength. The observed intensify of these peaks increases consistently with increasing the Al percentage.
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RARE METAL MATERIALS AND ENGINEERING
ISSN: 1002-185X
Year: 2021
Issue: 5
Volume: 50
Page: 1513-1517
0 . 5 0 6
JCR@2020
ESI Discipline: MATERIALS SCIENCE;
ESI HC Threshold:36
CAS Journal Grade:4
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 2
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