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Author:

Wang, Dan (Wang, Dan.) | Mao, Zhangsong (Mao, Zhangsong.) | Ye, Zhen (Ye, Zhen.) | Cai, Yahui (Cai, Yahui.) | Li, Yun (Li, Yun.) | He, Yongning (He, Yongning.) | Qi, Kangcheng (Qi, Kangcheng.) | Xu, Yanan (Xu, Yanan.) | Jia, Qingqing (Jia, Qingqing.)

Indexed by:

SCIE Scopus Web of Science

Abstract:

Alumina ceramics used in microwave systems are susceptible to the multiplication of secondary electron emission on the surface due to the influence of resonance between electrons and the radiofrequency electric field, and a detrimental multipactor effect may therefore be triggered. For the alumina-loaded microwave components, it is essential to achieve low secondary electron yield (SEY) on the inserted alumina surfaces to mitigate multipactor. In this work, to achieve an ultralow SEY surface of alumina, two recognized low-SEY treatments were combined. For the primary SEY suppression, a series of microstructures were fabricated on the alumina surfaces with varied porosity and aspect ratio at the hundred-micrometer scale by infrared laser etching. The microstructure with 52.14% porosity and 1.78 aspect ratio showed an excellent low-SEY property, which could suppress the SEY peak value ( delta (m) ) of alumina from 2.46 to 1.00. For the secondary SEY suppression, the SEY dependence of TiN coating on sputtering parameters was studied, and the lowest delta (m) of 1.19 was achieved when the gas flow ratio of Ar:N-2 was 15:7.5. Thereafter, by depositing TiN ceramic coating onto the laser-etched porous samples, an ultralow SEY, with delta (m) of 0.69, was achieved on the alumina surfaces. The simulation work revealed the impact of dielectric surface charge on electron multiplication and revealed a mechanism of using low-SEY surfaces to inhibit multipactor. Some coaxial filters filled with alumina were fabricated for verification; the results revealed that the multipactor threshold increased from 125 W to 425 W after applying the TiN-coated porous alumina, and to 650 W after treating another multipactor-sensitive area with the same low-SEY process. This work developed an advisable method to sharply reduce SEY, which is of great significance for the multipactor mitigation of alumina-loaded microwave components.

Keyword:

alumina microstructure multipactor secondary electron emission

Author Community:

  • [ 1 ] [Wang, Dan]Xi An Jiao Tong Univ, Sch Microelectron, Xian 710049, Peoples R China
  • [ 2 ] [Mao, Zhangsong]Xi An Jiao Tong Univ, Sch Microelectron, Xian 710049, Peoples R China
  • [ 3 ] [Cai, Yahui]Xi An Jiao Tong Univ, Sch Microelectron, Xian 710049, Peoples R China
  • [ 4 ] [He, Yongning]Xi An Jiao Tong Univ, Sch Microelectron, Xian 710049, Peoples R China
  • [ 5 ] [Wang, Dan]ZhongKe Atomically Precise Mfg Technol Co Ltd, Xian 710119, Peoples R China
  • [ 6 ] [Ye, Zhen]Xian TST Testing Tech Co Ltd, Xian 710076, Peoples R China
  • [ 7 ] [Li, Yun]China Acad Space Technol Xian, Natl Key Lab Sci & Technol Space Microwave, Xian 710100, Peoples R China
  • [ 8 ] [Qi, Kangcheng]Univ Elect Sci & Technol China, Sch Optoelectron Sci & Engn, Chengdu 610000, Peoples R China
  • [ 9 ] [Xu, Yanan]Shanghai Engn Res Ctr Space Engine, Shanghai Inst Space Prop, Shanghai 201112, Peoples R China
  • [ 10 ] [Jia, Qingqing]Shanghai Engn Res Ctr Space Engine, Shanghai Inst Space Prop, Shanghai 201112, Peoples R China

Reprint Author's Address:

  • [Wang, D.]School of Microelectronics, China;;[Wang, D.]School of Microelectronics, China;;

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Source :

JOURNAL OF PHYSICS D-APPLIED PHYSICS

ISSN: 0022-3727

Year: 2022

Issue: 45

Volume: 55

3 . 2 0 7

JCR@2020

ESI Discipline: PHYSICS;

ESI HC Threshold:6

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 7

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 7

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