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This paper studies the structure of IBED Cr-N coatings with different parameters such as N partial pressure, N ions bombarding energy and N ions/Cr atoms ratio. The results show that the chemical composition and structure of the coatings are mainly determined by N partial pressure. According to N partial pressure increasing, there are an increase of CrN phase and a decrease of Cr and Cr2N phase. The grain orientations of the coatings are affected by bombarding energy. When N ions/Cr atoms ratio changed from 1.45×10-2 to 5.87×10-2, high N ion flux of bombarding will result in acceleration of sputtering away from the coated CrN layer as well as its decomposition. In the mean time Cr2O3 is easy to be produced in the layer.
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Wuji Cailiao Xuebao/Journal of Inorganic Materials
ISSN: 1000-324X
Year: 1999
Issue: 4
Volume: 14
1 . 0 4 1
JCR@2020
ESI Discipline: MATERIALS SCIENCE;
JCR Journal Grade:3
CAS Journal Grade:4
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 2
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