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Author:

He, Huang (He, Huang.) | Xuegang, Wang (Xuegang, Wang.) | Xiaodong, Zhu (Xiaodong, Zhu.) | Hua, Chen (Hua, Chen.) | Jiawen, He (Jiawen, He.)

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Scopus CSCD SCOPUS

Abstract:

Titanium nitride films were deposited by ion beam assisted deposition, magnetron sputtering and ion-beam assisted magnetron sputtering deposition on GCr15 and Si substrate. The structure and mechanical properties such as micro-hardness, bonding strength, wear resistance were studied as well as the corrosion resistance. The results show that the hardness, bonding strength and wear resistance of the titanium nitride films deposited by ion-beam assisted magnetron sputtering are increased greatly and the corrosion resistance of films is also improved.

Keyword:

Bonding strength Film Magnetron sputtering TiN Wear resistance

Author Community:

  • [ 1 ] [Jiawen, He]Xi'an Jiaotong University, State Key Laboratory for Mechanical Behavior of Materials,Xi'an,China

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Source :

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

ISSN: 1002-185X

Year: 2002

Issue: 3

Volume: 31

0 . 2 2 5

JCR@2002

0 . 5 0 6

JCR@2020

ESI Discipline: MATERIALS SCIENCE;

JCR Journal Grade:3

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 1

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 6

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