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Abstract：
Titanium nitride films were deposited by ion beam assisted deposition, magnetron sputtering and ion-beam assisted magnetron sputtering deposition on GCr15 and Si substrate. The structure and mechanical properties such as micro-hardness, bonding strength, wear resistance were studied as well as the corrosion resistance. The results show that the hardness, bonding strength and wear resistance of the titanium nitride films deposited by ion-beam assisted magnetron sputtering are increased greatly and the corrosion resistance of films is also improved.
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Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
ISSN： 1002-185X
Year： 2002
Issue： 3
Volume： 31
Page： 208
0 . 2 2 5
JCR@2002
0 . 5 0 6
JCR@2020
ESI Discipline： MATERIALS SCIENCE;
JCR Journal Grade：3
CAS Journal Grade：4
Cited Count：
WoS CC Cited Count： 0
SCOPUS Cited Count：
ESI Highly Cited Papers on the List： 0 Unfold All
WanFang Cited Count：
Chinese Cited Count：
30 Days PV： 3
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