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Abstract:
Nanocrystallite TiN films were deposited on W18Cr4V high-speed steel (HSS) substrates using pulsed d.c. bias multi-arc ion plating, the mechanism of the super hardness of the nanocrystallite TiN films was investigated. The results show that the film thickness is 2-3 μm, the crystalline size is about 13-16 nm, and especially the nanocrystallite TiN films hold super hardness of 36-43 GPa. The measured hardness of annealed nanocrystallite TiN films at elevated temperature confirm that the super hardness of the nanocrystallite TiN films are produced not only by the ion bombardment induced residual stress within the film, but also due to the decrease of crystalline size, dense microstructure and the film deposition onto the strongly preferential orientation with the (111) plane, which is the atomic closed arrangement plane of f.c.c. TiN.
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Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research
ISSN: 1005-3093
Year: 2008
Issue: 2
Volume: 22
Page: 201-204
Cited Count:
WoS CC Cited Count: 3
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 0
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